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Senior Manager, Global Service Sales

Join Thermo Fisher Scientific's next #semiconductor webinar on March 26 (Americas) / March 27 (Asia Pacific) to see how the Thermo Scientific Metrios 6 (S)TEM can help overcome challenges associated with measuring the critical dimension and compositional distribution of beam-sensitive DRAM capacitor structures. Learn about: - Interfacial diffusion and distribution of high-k material within DRAM capacitors during STEM-EDS data collection - The effect of the electron beam and its impact on #metrology characterization - Strategies to optimize EDS data collection with minimal beam damage, high-throughput, and reproducible metrology

Automated STEM-EDS Metrology and Characterization of DRAM Capacitors | Thermo Fisher Scientific - US

Automated STEM-EDS Metrology and Characterization of DRAM Capacitors | Thermo Fisher Scientific - US

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