Objective
The SeNaTe project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 12nm and 10nm technology nodes. The main objective is the demonstration of the 7nm IC technology integration in line with the industry needs and the ITRS roadmap on real devices in the Advanced Patterning Center at imec using innovative device architecture and comprising demonstration of a lithographic platform for EUV and immersion technology, advanced process and holistic metrology platforms, new materials and mask infrastructure.
A lithography scanner will be developed based on EUV technology to achieve the 7nm module patterning specification. Metrology platforms need to be qualified for N7’s 1D, 2D and 3D geometries with the appropriate precision and accuracy. For the 7nm technology modules a large number of new materials will need to be introduced. The introduction of these new materials brings challenges for all involved processes and the related equipment set. Next to new deposition processes also the interaction of the involved materials with subsequent etch, clean and planarization steps will be studied. Major European stakeholders in EUV mask development will collaboratively work together on a number of key remaining EUV mask issues.
The first two years of the project will be dedicated to find the best options for patterning, device performance, and integration. In the last year a full N7 integration with electrical measurements will be performed to enable the validation of the 7nm process options for a High Volume Manufacturing.
The SeNaTe project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets as set out in the MASP at the discovery of new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the nano-structuring of electronic devices with 7nm resolution in high-volume manufacturing and fast prototyping.
Fields of science
- engineering and technologynanotechnologynano-materialstwo-dimensional nanostructuresgraphene
- engineering and technologymaterials engineeringcoating and films
- natural sciencesphysical scienceselectromagnetism and electronicssemiconductivity
- natural scienceschemical sciencesinorganic chemistrymetalloids
- engineering and technologymaterials engineeringceramics
Programme(s)
Funding Scheme
ECSEL-IA - ECSEL Innovation ActionCoordinator
5504DR Veldhoven
Netherlands
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Participants (51)
74000 Annecy
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3001 Leuven
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76705 Rehovot
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1109 Dresden
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38000 GRENOBLE
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
3001 HEVERLEE
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1322 AP ALMERE
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73614 SCHORNDORF
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
51429 Bergisch Gladbach
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78315 Radolfzell
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91300 MASSY
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
7521 PH Enschede
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
5683 CR Best
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
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7521 PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
7521 PH Enschede
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34000 Montpellier
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
627 00 Brno
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5651 GG Eindhoven
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80686 Munchen
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01109 Dresden
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
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63450 Hanau
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85551 Heimstetten
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3001 Leuven
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70569 Stuttgart
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82109 KIRYAT GAT
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
Participation ended
19801 WILMINGTON NEW CASTLE DE
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07745 JENA
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2306990 Migdal Haemek
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
DH1 1TW Durham
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
76187 Karlsruhe
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35781 Weilburg
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23100 Migdal Haemek
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9500 Villach
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3001 Leuven
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20692 Yokneam
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76100 REHOVOT
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38116 Braunschweig
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31700 Blagnac
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
1117 BUDAPEST
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38190 Bernin
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75447 Sternenfels
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The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.
2595 DA Den Haag
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7522 NB Enschede
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5652 AW Eindhoven
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
5651 GG Eindhoven
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Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.
5651 GH Eindhoven
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73447 Oberkochen
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1322 AP Almere
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